An Accurate Quantitative X-ray Photoelectron Spectroscopy Study of Pure and Homogeneous ZrN Thin Films Deposited Using BPDMS
https://doi.org/10.3390/app13031271 “A quantitative X-ray Photoelectron Spectroscopy (XPS) study has been undertaken on different experimental data sets of ZrN thin films deposited using reactive Bipolar Pulsed